Synthesis of two aminosilanes as CVD precursors of SiCxNx films: Tuning film composition by Molecular Structures by Liyong Du & Yanlong Bai & Wenxiang Chu & Yuqiang Ding

Synthesis of two aminosilanes as CVD precursors of SiCxNx films: Tuning film composition by Molecular Structures by Liyong Du & Yanlong Bai & Wenxiang Chu & Yuqiang Ding

Author:Liyong Du & Yanlong Bai & Wenxiang Chu & Yuqiang Ding
Format: pdf
Tags: Aminosilanes, CVD, SiCxNx films, molecular structure, composition
Publisher: Taylor & Francis
Published: 2018-04-16T01:30:32+00:00


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